NanoMEMS Research , LLC
Let's Seize the Future...Today !
NanoMEMS Research , LLCLet's Seize the Future...Today ! |
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©2005 NanoMEMS Research, LLC. All Rights Reserved.
Course Syllabus
1 Microelectromechanical Systems
1.1 MEMS Origins
1.2 MEMS Impetus/Motivation
1.3 MEMS Fabrication Technologies
1.3.1 Conventional IC Fabrication Process
1.3.2 Bulk Micromachining
1.3.3 Surface Micromachining
1.3.4 Fusion Bonding
1.3.5 LIGA
1.4 Exercises
2 Fundamental MEMS Device Physics
2.1 Actuation
2.1.1 Parallel-Plate Capacitor
2.1.2 Interdigitated "Comb-drive" Capacitor
2.2 Mechanical Vibrations
2.2.1 The Single-Degree-of-FreedomSystem
2.2.2 The Many-Degrees-of-Freedom System
2.2.3 Rayleigh's Method
2.3 Computer-Aided Design of MEMS
2.3.1 MEMS Materials and Fabrication Process Modeling
2.3.2 Solid Modeling
2.3.3 Numerical Simulation of MEMS
2.3.4 Lumped-Parameter Modeling
2.4 Exercises
3 Fundamental MEMS Devices: The MEM Switch
3.1 Introduction
3.2 The Cantilever Beam MEM Switch
3.3 MEM Switch Design Considerations
3.3.1 Switch Specifications
3.3.2 Microwave Considerations
3.3.3 MaterialConsiderations
3.3.4 Mechanical Considerations
4 Fundamental MEMS Devices: The MEM Resonator
4.1 Introduction
4.2 The Cantilever Beam MEM Resonator
4.3 MEM Resonator Design Considerations
4.3.1 Resonator Specifications
4.3.2 Microwave Considerations
4.3.3 Micromechanical Resonator Limitations
4.4 Exercises
5 Microwave MEMS Applications
5.1 Introduction
5.2 MEM Switches
5.2.1 Coplanar Cantilever Beam MEM Switch Performance Analysis
5.2.2 Series Cantilever Beam MEM Switch
5.2.3 Shunt Cantilever Beam MEM Switch
5.2.4 Membrane MEM Switch
5.2.5 Side-Driven Mercury-Contacted MEM Switch
5.3 Micromachining-Enhanced Planar Microwave Passive Elements
5.3.1 Micromachined Transmission Lines
5.3.2 Micromachining-Enhanced Lumped Elements
5.4 MEM Resonators
5.4.1 MEM Resonator Fabrication
6 MEMS-Based Microwave Circuits and Systems
6.1 Introduction
6.2 Wireless Communications Systems
6.2.1 Fundamentals of Wireless Communications
6.2.2 Fundamentals of Satellite Communications
6.3 MEMS-Based RF and Microwave Circuits
6.3.1 Phase Shifters
6.3.2 Resonators
6.3.3 Filters
6.3.4 Oscillators
6.3.5 Mixers
6.3.6 Packaging
7 RF/Wireless MEMS Insertion and Commercialization
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