NanoMEMS Research , LLC
Let's Seize the Future...Today !
NanoMEMS Research , LLCLet's Seize the Future...Today ! |
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©2005 NanoMEMS Research, LLC. All Rights Reserved.
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Course Syllabus
Chapter 1. WIRELESS SYSTEMS—A CIRCUITS PERSPECTIVE
1.1 Introduction
1.2 Spheres of wireless activity —Technical issues
1.3 Wireless standards, systems, and architectures
1.4 Power and bandwidth-efficient wireless systems —Challenges
1.5 MEMS-based wireless appliances enable ubiquitous connectivity
Chapter 2. ELEMENTS OF RF CIRCUIT DESIGN
2.1 Introduction
2.2 Physical Aspects of RF Circuit Design
2.2.1 Skin Effect
2.2.2 Transmission lines on thin substrates
2.2.2.1 Thin film microstrip line model
2.2.2.2 Coplanar waveguide line model
2.2.3 Self-Resonance Frequency
2.2.4 Quality Factor
2.3.3.1 Definition of quality factor
2.3.3.2 On the experimental determination of the quality factor
2.3.3.3 Importance of passives quality factor in RF circuits
2.2.5 Moding (Packaging)
2.3 Practical Aspects of RF Circuit Design
2.3.1 DC Biasing
2.3.2 Impedance mismatch effects in RF MEMS
2.4 Exercises
Chapter 3. RF MEMS-ENABLED CIRCUITS ELEMENTS AND MODELS
3.1 Introduction
3.2 RF/Microwave substrate properties
3.3 Micromachined-Enhanced Elements
3.3.1 Capacitors
3.3.1.1 Interdigitated Capacitors
3.3.1.2 Metal-insulator-metal (MIM) capacitor
3.3.2 Inductors
3.3.2.1 Bulk micromachined inductors
3.3.2.2 Elevated surface micromachined inductors
3.3.2.3 Air-core solenoid inductors
3.3.2.4 Embedded solenoid inductors
3.3.2.5 Self-assembled vertical inductors
3.3.3 Varactors
3.3.3.1 Parallel plate varactor
3.3.3.2 Interdigitated varactor
3.3.3.3 Movable-dielectric varactor
3.3.3.4 Digitally-controlled parallel-plate varactor
3.3 MEM switches
3.3.1 Shunt MEM switch
3.3.2 Low-voltage hinged MEM switch approaches
3.3.2.1 Serpentine-spring suspended shunt switch
3.3.3 Push-pull series switch
3.3.4 Folded-beam-springs suspension series switch
3.4 Resonators
3.4.1 Transmission line planar resonator
3.4.2 Cavity resonators
3.4.3 Micromechanical resonators
3.4.3.1 Clamped-clamped MEM resonator
3.4.3.2 Free-free MEM resonator
3.4.4 Film bulk surface acoustic wave (FBAR) resonator
3.5 MEMS modeling
3.4.1 MEMS mechanical modeling
3.4.2 MEMS electromagnetic modeling
Chapter 4. NOVEL RF MEMS-ENABLED CIRCUITS
4.1 Introduction
4.2 Reconfigurable Circuit Elements
4.2.1 The resonant MEMS switch
4.2.2 Capacitors
4.2.2.1 The binary capacitor
4.2.2.3 The binary-weighted capacitor array
4.2.3 Inductors
4.2.3.1 The binary-weighted inductor array
4.2.3.2 Series and shunt tunable inductor arrays
4.2.4 Tunable CPW resonator
4.2.5 MEMS Microswitch arrays
4.3 Reconfigurable Circuits
4.3.1 Double-stub tuner
4.3.2 Nth-stub tuner
4.3.3 Filters
4.3.4 Resonator tuning system
4.3.5 Massively-parallel switchable RF front-ends
4.3.6 True time-delay digital phase shifters
4.4 Reconfigurable Antennas
4.4.1 Tunable dipole antenna
4.4.2 Tunable microstrip patch-array antenna
Chapter 5. RF MEMS-BASED CIRCUIT DESIGN—CASE STUDIES
5.1 Introduction
5.2 Phase Shifters
5.2.1 Phase shifter fundamentals
5.2.2 X-band RF MEMS phase shifter for phased array applications—Case Study
5.2.3 Ka-band RF MEMS phase shifter for phased array applications—Case Study
5.2.4 Ka-band RF MEMS phase shifter for radar applications—Case Study
5.3 Film bulk acoustic wave (FBAR) filters
5.3.1 FBAR filter fundamentals
5.3.2 Film bulk acoustic wave (FBAR) filter for PCS applications—Case Study
5.4 RF MEMS Filters
5.4.1 A Ka-band millimeter-wave micromachined tunable filter—Case Study
5.4.2 A High-Q 8-MHz MEM resonator filter—Case Study
5.5 RF MEMS oscillators
5.4.1 RF MEMS oscillator fundamentals
5.4.2 A 14 MHz microelectromechanical oscillator—Case Study
5.4.3 A Ka-band micromachined cavity oscillator—Case Study
5.4.4 A 2.4 GHz MEMS-based voltage-controlled oscillator—Case Study=============================================================================
Any Technical Questions? Ask NanoMEMS!
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